SMC壓力傳感器 壓力開(kāi)關(guān)安裝手冊(cè) IZS40-2320-08B

在玻璃基板上中和靜電
防止由于當(dāng)基板從表面板提起時(shí)產(chǎn)生的靜電引起的玻璃基板的破裂
在電氣基板上中和靜電
防止由于在切割后拾取襯底時(shí)產(chǎn)生的靜電而導(dǎo)致的電襯底的破損。
反饋傳感器類(lèi)型系列IZS41（高速靜態(tài)除電規(guī)格）
通過(guò)反饋傳感器快速中和靜電
注）安裝了離子平衡傳感器。
通過(guò)反饋傳感器（可選件）讀取工件的靜電勢(shì)并連續(xù)發(fā)射具有相反極性的離子，增加了靜態(tài)中和速度。

Neutralizing static electricity on a glass substrate
Prevents the breakage of glass substrates due to the static electricity which is generated when the substrate is lifted from the surface plate
Neutralizing static electricity on an electric substrate
Prevents the breakage of electric substrates due to the static electricity which is generated when the substrates are picked up after dicing.

SMC壓力傳感器 壓力開(kāi)關(guān)安裝手冊(cè) IZS40-2320-08B
Feedback sensor type Series IZS41(High speed static neutralization specification)
Rapid neutralization of static electricity by a feedback sensor
Note) An ion balance sensor is installed.
The speed of static neutralization has been increased by reading the workpiece's electrostatic potential by the feedback sensor (option) and continuously emitting ions with a reverse polarity.

IZS40-1120-06B
IZS40-1300-06B
IZS40-1600-08B
IZS40-1900-08B
IZS40-340-06B
IZS40-400-06B
IZS40-460-06B
IZS40-580-06B
IZS40-640-06B
IZS40-820-06B
IZS40-BE
IZS40-BM
IZS40-CP
IZS40-CPZ
IZS40-E3
IZS40-E4
IZS40-E5
IZS40-NC
IZS40-NJ
IZS40-NK
IZS40-NT